Wafer Bright & Dark Field Inspection Objective
Equipment Accuracy:
Detailed Introduction:Wafer Bright and Dark Field Objective is an infinity-corrected plan compound objective for semiconductor wafer defect inspection. It integrates bright-field and dark-field dual optical paths into one single objective. Compatible with metallurgical microscopes and wafer AOI systems, this lens is used for defect inspection of 6/8/12-inch bare wafers, post-lithography wafers and diced chips. It is a key optical component for semiconductor front-end process and packaging quality control.
