Wafer Bright & Dark Field Inspection Objective
Equipment Accuracy:
Detailed Introduction:Wafer Bright/Dark Field Objective is an infinity-corrected plan compound objective tailored for semiconductor wafer defect inspection. This single objective incorporates dual bright-field and dark-field optical paths. It matches metallographic microscopes, semiconductor inspection microscopes and wafer AOI equipment, and is used for defect detection of 6/8/12-inch bare wafers, post-photolithography wafers and diced chips. It is a core optical part for semiconductor front-end processes and packaging quality control.
