Wafer Bright & Dark Field Inspection Objective
Equipment Accuracy:
Detailed Introduction:Wafer Bright & Dark Field Inspection Objective is an infinity-corrected plan compound objective dedicated to semiconductor wafer defect inspection. It integrates built-in bright-field and dark-field dual optical paths within a single lens. Compatible with metallographic microscopes, semiconductor inspection microscopes and wafer AOI equipment, it is applicable to defect detection of 6/8/12-inch bare wafers, post-lithography wafers and diced chips. It is a core optical component for semiconductor front-end manufacturing and packaging quality control.
