Bright-field and Dark-field Inspection Lens for Crystal Wafer
Equipment Accuracy:
Detailed Introduction:This infinite corrected plan achromatic objective for crystal wafer bright-field and dark-field inspection is specially designed for semiconductor wafer defect detection. A single objective integrates both bright-field and dark-field optical paths. Compatible with metallographic and semiconductor inspection microscopes as well as wafer AOI equipment, it is used for defect detection of 6/8/12-inch bare wafers, post-photolithography wafers and chip dicing wafers. It serves as a core optical component for front-end semiconductor processes and packaging quality inspection.
